Solar Magnetron Sputtering Equipment for Perovskite Thin Film Coating
Solar Magnetron Sputtering Equipment for Perovskite Thin Film Coating
SIMVACO magnetron sputtering equipment is designed for precision thin-film deposition of perovskite materials, widely used in advanced solar cell manufacturing. This system delivers high-efficiency and uniform coatings, enabling consistent layer quality essential for improving energy conversion in perovskite solar cells.
Key Features
- Precision Magnetron Sputtering: Ensures controlled and uniform deposition of perovskite thin films with optimized layer thickness and material density.
- Large Substrate Compatibility: Handles substrates up to 600×600 mm, supporting R&D and pilot-scale production for solar cell manufacturing.
- Stable Vacuum Performance: Achieves vacuum levels of ≤1×10⁻⁴ Pa, ensuring a clean process environment that minimizes contamination and defects.
- Real-Time Process Monitoring: Integrated systems track film thickness, deposition rate, and vacuum stability for repeatable and precise results.
- Multi-Layer Deposition: Supports the creation of multi-stack thin-film structures critical for efficient perovskite solar cell production.
- Substrate Heating Control: Adjustable heating up to 350°C enhances film crystallization and adhesion, improving overall solar cell performance.
Technical Specifications
| Parameter | Specification |
|---|---|
| Deposition Technology | Magnetron Sputtering |
| Coating Material | Perovskite, Conductive Oxides, Metals |
| Substrate Size | Up to 600×600 mm |
| Vacuum Pressure | ≤1×10⁻⁴ Pa |
| Coating Uniformity | ±1% |
| Film Thickness Range | 10nm - 500nm |
| Deposition Speed | Up to 5nm/s |
| Substrate Heating | Up to 350°C |
| Process Control | Real-time thickness and vacuum monitoring |
Applications
- Perovskite Solar Cells: Uniform and stable thin-film deposition for improving solar energy conversion efficiency.
- Multi-Layer Solar Coatings: Deposition of conductive and functional layers required for advanced solar cell architectures.
- Research and Development: Ideal for perovskite material testing, prototyping, and pilot-scale production.
- Optoelectronic Devices: Thin-film coatings for sensors, flexible displays, and related optoelectronic components.
Process Advantages
- High Uniformity: Delivers consistent coating thickness and material properties across the entire substrate surface.
- Scalable Production: Designed for large substrates, ensuring adaptability from laboratory to pilot-scale manufacturing.
- Precision Control: Real-time monitoring systems ensure accuracy and repeatability for complex multi-layer thin films.
- Material Efficiency: Optimized sputtering processes minimize target material waste and enhance deposition performance.
Our magnetron sputtering equipment for perovskite coating represents advanced technology for high-precision deposition critical to next-generation solar cell manufacturing. With stable vacuum performance, substrate heating, and multi-layer capability, it meets the demands of research and industrial applications focused on improving solar efficiency. For more information or to request a demonstration, please contact us today!
