High-level Vacuum Gate Valves for Optimal Airflow in Vacuum Systems
High-level Vacuum Gate Valves for Optimal Airflow in Vacuum Systems
Our Vacuum Gate Valve is designed to provide precise control over airflow within vacuum systems. Ideal for applications requiring an airtight seal and efficient control of gases, this valve ensures optimal performance in various industries, including semiconductor manufacturing, research, and industrial vacuum processes.
Key Features
-
Unrestricted Gas Flow: When fully opened, the gate valve allows for smooth and unobstructed gas flow, which is essential for maintaining high vacuum conditions. This feature is particularly beneficial in processes such as thin film deposition and surface analysis.
- Robust Design: Constructed from high-quality stainless steel, our gate valve is designed to withstand harsh environments and high levels of process by-products in the gas stream. This durability ensures a long service life and reliable operation.
- Effective Isolation: The gate mechanism effectively isolates different chambers within the vacuum system. This capability allows one chamber to remain at UHV while another can be vented to atmosphere, facilitating processes like load-lock operations where samples are introduced without compromising vacuum integrity.
- Minimal Maintenance: The innovative sealing mechanism eliminates the need for grease, reducing maintenance requirements and the risk of contamination from lubricants. This design enhances the overall reliability of the valve.
Technical Specifications
| Specification | Details |
|---|---|
| Valve Type | Gate Valve |
| Material | Stainless Steel (Custom options available) |
| Seal Type | Metal or Elastomer Seals (depending on application) |
| Operating Pressure | Up to 10^-6 Torr |
| Nominal Size | Customizable (Standard sizes available) |
| Temperature | Open: 200°C; Closed: 150°C |
| Port Type | Flanged, Threaded, or Custom |
| Application | Vacuum Systems, Semiconductor Processing, Research Applications |
| Actuation Type | Manual or Pneumatic |
Applications
- Thin Film Deposition: Essential in semiconductor manufacturing and materials science where precise control over vacuum conditions is required.
- Surface Analysis: Used in analytical instruments that require isolation of samples from atmospheric contamination during measurement processes.
- Cryopumps and Turbo Pumps: Provides effective isolation for pumps in high vacuum systems, ensuring optimal performance and longevity.
