Compound Electron Beam Evaporation Coating Machine for Electronics
Compound Electron Beam Evaporation Coating Machine for Electronics
SIMVACO’s high-performance vacuum deposition system utilizes cutting-edge Electron Beam Evaporation Technology to deliver advanced thin-film coatings for electronic applications. Designed for precision, scalability, and reliability, this state-of-the-art system meets the stringent requirements of modern electronics manufacturing.
Key Features
Electron Beam Evaporation Technology
- High Deposition Rates: Capable of achieving rates from 0.1 nm/min to 100 nm/min, allowing for efficient production.
- Material Purity: Minimizes contamination by focusing heat directly on the target material rather than the entire crucible.
- Versatility: Suitable for a wide range of materials, including metals, dielectrics, and complex multilayer structures.
Technical Specifications
| Parameter | Specification |
|---|---|
| Model | E-Beam Evaporation Coating System |
| Vacuum Chamber Size | 500×500×600 mm |
| Ultimate Vacuum | ≤6.67×10^-4 Pa |
| Electron Gun Voltage | 6 kV / 8 kV |
| Power Supply | Adjustable up to 10 kW |
| Substrate Heating Temperature | Up to 800°C ± 1°C |
| Rotational Speed | 5-60 RPM |
| Film Thickness Control | Quartz crystal oscillation monitor |
Advanced Vacuum and Automation Systems
- Ultra-High Vacuum Environment: Operates at 10⁻³ to 10⁻⁴ Torr to ensure clean deposition and defect-free coatings.
- Full Process Automation: Includes automated substrate handling, deposition, and diagnostics for seamless operation.
- Energy-Efficient Design: Reduces power consumption while maintaining high-performance output.
Applications
- Semiconductors: Deposits precision thin films for ICs, transistors, and diodes.
- Display Technology: Provides uniform coatings for OLEDs, LCDs, and touch panels.
- Sensors: Coats sensitive components used in advanced sensor systems.
- Optoelectronics: Enhances efficiency and reliability of LEDs, lasers, and photodetectors.
Advantage
- Precision and Consistency: Ensures high-quality coatings with excellent uniformity and adhesion.
- Advanced Control Systems: Equipped with programmable sweep controllers and real-time monitoring systems to ensure precise control over deposition processes.
- Efficient Pumping System: Features a turbomolecular or cryo-pumping group for rapid vacuum recovery, enhancing throughput.
- User-Friendly Interface: The touch screen control panel simplifies operation and monitoring of the coating process.
- Customizable Options: Available configurations include multiple crucibles and integrated load-lock systems for enhanced productivity.
Why Choose SIMVACO?
As a leader in electron beam evaporation technology, SIMVACO offers tailored solutions to meet the complex demands of the electronics industry. Our advanced systems ensure reliable, precise, and scalable coatings that enhance product performance and durability.
Contact Us
Enhance your manufacturing capabilities with SIMVACO’s cutting-edge electron beam evaporation systems. Contact us via simon@simvaco.com
