Advanced PECVD Coating Equipment for Large Flexible Substrates
Advanced PECVD Coating Equipment for Large Flexible Substrates
Our PECVD (Plasma Enhanced Chemical Vapor Deposition) Coating Equipment is engineered for large flexible substrates, delivering high-performance thin-film coatings with precision and scalability. Designed to meet industrial demands, it ensures uniform deposition of advanced barrier and functional layers for aerospace, flexible electronics, and specialty film applications.
Key Features
- Large Substrate Capability: Supports roll-to-roll coating for flexible substrates, including PET, PI, and other polymer films, with widths up to 1,000 mm.
- Advanced PECVD Technology: Enables high-precision deposition of barrier materials like SiOx, AlOx, and functional coatings for superior moisture and oxygen resistance.
- High Deposition Uniformity: Ensures coating uniformity of ±3% across the entire substrate surface, maintaining consistent film thickness from edge to edge.
- Real-Time Process Control: Integrated sensors monitor vacuum levels, plasma density, and film deposition rate to ensure process stability and repeatability.
- Substrate Heating System: Adjustable heating up to 350°C to enhance film adhesion and material properties during deposition.
Technical Specifications
| Parameter | Specification |
|---|---|
| Deposition Technology | PECVD |
| Substrate Type | Flexible Films (PET, PI, etc.) |
| Substrate Width | Up to 1,000 mm |
| Vacuum Pressure | ≤1×10⁻⁴ Pa |
| Coating Uniformity | ±3% |
| Film Thickness Range | 10nm - 500nm |
| Deposition Speed | Up to 10nm/s |
| Substrate Heating | Up to 350°C |
| Materials | SiOx, AlOx, Siloxane |
Applications
- Aerospace Industry: Thin, lightweight barrier films to enhance material performance and protection in extreme environments.
- Flexible Electronics: Barrier and protective films for foldable displays, sensors, and flexible circuits.
- High-Barrier Packaging: Advanced coatings for flexible packaging requiring superior moisture and oxygen resistance.
- Specialty Films: Functional coatings for optical films, industrial membranes, and high-performance aerospace substrates.
This PECVD coating system delivers scalable, high-precision solutions for coating large flexible substrates, ensuring exceptional film uniformity and throughput. Its advanced control systems, high substrate compatibility, and efficient production processes make it ideal for aerospace applications where precision and reliability are critical.
